| 000 | 00954nam a2200325Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s9999 xx 000 0 und d | ||
| 022 | _a2160-5041 | ||
| 041 | _aeng | ||
| 245 | _aOptical MEMS, IEEE/LEOS International Conference on | ||
| 260 | _bIEEE | ||
| 500 | _aConference | ||
| 650 | _aAerospace | ||
| 650 | _aBioengineering | ||
| 650 | _aCircuits | ||
| 650 | _aCommunication | ||
| 650 | _aComponents | ||
| 650 | _aDevices and Systems | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEnergy and Industry Applications | ||
| 650 | _aEngineered Materials | ||
| 650 | _aFields | ||
| 650 | _aNetworking and Broadcast Technologies | ||
| 650 | _aPhotonics and Electrooptics | ||
| 650 | _aPower | ||
| 650 | _aRobotics and Control Systems | ||
| 650 | _aSignal Processing and Analysis | ||
| 650 | _aTransportation | ||
| 650 | _aWaves and Electromagnetics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=1000525 | ||
| 999 |
_c44905 _d44905 |
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