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041 _aeng
245 _aMicro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
260 _bIEEE
500 _aConference
650 _aDielectrics and Plasmas
650 _aEnergy and Industry Applications
650 _aEngineered Materials
650 _aEngineering Profession
650 _aPower
856 _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=1836364
999 _c44633
_d44633