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|---|---|---|---|
| 008 | 230209s9999 xx 000 0 und d | ||
| 041 | _aeng | ||
| 245 | _ae-Manufacturing and Design Collaboration Symposium (eMDC) & International Symposium on Semiconductor Manufacturing (ISSM), Joint | ||
| 260 | _bIEEE | ||
| 500 | _aConference | ||
| 650 | _aComputing and Processing | ||
| 650 | _aEngineering Profession | ||
| 650 | _aGeneral Topics for Engineers | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=1809824 | ||
| 999 |
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||