| 000 | 00568nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s9999 xx 000 0 und d | ||
| 022 | _a2376-6697 | ||
| 041 | _aeng | ||
| 245 | _aAdvanced Semiconductor Manufacturing, IEEE/SEMI Conference and Workshop | ||
| 260 | _bIEEE | ||
| 500 | _aConference | ||
| 650 | _aCircuits | ||
| 650 | _aComponents | ||
| 650 | _aDevices and Systems | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEngineered Materials | ||
| 650 | _aEngineering Profession | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=1000018 | ||
| 999 |
_c42362 _d42362 |
||