| 000 | 00536nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2019 xx 000 0 und d | ||
| 022 | _a978-1-5386-5851-2 | ||
| 022 | _a978-1-5386-6525-1 | ||
| 041 | _aeng | ||
| 245 | _a2019 International Seminar on Electron Devices Design and Production (SED) | ||
| 260 |
_bIEEE _c2019 |
||
| 500 | _aProceeding | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEngineered Materials | ||
| 650 | _aPhotonics and Electrooptics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8789386 | ||
| 999 |
_c37124 _d37124 |
||