000 00520nam a2200169Ia 4500
008 230209s2019 xx 000 0 und d
022 _a978-1-7281-0940-4
022 _a978-1-7281-0941-1
041 _aeng
245 _a2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
260 _bIEEE
_c2019
500 _aProceeding
650 _aCircuits
650 _aComponents
650 _aDevices and Systems
856 _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8863874
999 _c37073
_d37073