| 000 | 00760nam a2200241Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2019 xx 000 0 und d | ||
| 022 | _a978-1-7281-4029-2 | ||
| 022 | _a978-1-7281-4030-8 | ||
| 041 | _aeng | ||
| 245 | _a2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) | ||
| 260 |
_bIEEE _c2019 |
||
| 500 | _aProceeding | ||
| 650 | _aCircuits | ||
| 650 | _aComponents | ||
| 650 | _aComputing and Processing | ||
| 650 | _aDevices and Systems | ||
| 650 | _aEnergy and Industry Applications | ||
| 650 | _aFields | ||
| 650 | _aPhotonics and Electrooptics | ||
| 650 | _aPower | ||
| 650 | _aWaves and Electromagnetics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8806197 | ||
| 999 |
_c36749 _d36749 |
||