| 000 | 00658nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2019 xx 000 0 und d | ||
| 022 | _a978-1-7281-5638-5 | ||
| 022 | _a978-1-7281-5639-2 | ||
| 041 | _aeng | ||
| 245 | _a2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) | ||
| 260 |
_bIEEE _c2019 |
||
| 500 | _aProceeding | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEnergy and Industry Applications | ||
| 650 | _aEngineered Materials | ||
| 650 | _aEngineering Profession | ||
| 650 | _aPower | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=9077928 | ||
| 999 |
_c35584 _d35584 |
||