| 000 | 00692nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2018 xx 000 0 und d | ||
| 022 | _a978-1-5386-3748-7 | ||
| 022 | _a978-1-5386-3749-4 | ||
| 041 | _aeng | ||
| 245 | _a2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | ||
| 260 |
_bIEEE _c2018 |
||
| 500 | _aProceeding | ||
| 650 | _aCircuits | ||
| 650 | _aComponents | ||
| 650 | _aDevices and Systems | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEnergy and Industry Applications | ||
| 650 | _aEngineered Materials | ||
| 650 | _aEngineering Profession | ||
| 650 | _aPower | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8370149 | ||
| 999 |
_c33870 _d33870 |
||