| 000 | 00621nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2017 xx 000 0 und d | ||
| 022 | _a978-1-5090-5448-0 | ||
| 022 | _a978-1-5090-5449-7 | ||
| 041 | _aeng | ||
| 245 | _a2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | ||
| 260 |
_bIEEE _c2017 |
||
| 500 | _aProceeding | ||
| 650 | _aCircuits | ||
| 650 | _aComponents | ||
| 650 | _aDevices and Systems | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEngineered Materials | ||
| 650 | _aEngineering Profession | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=7958783 | ||
| 999 |
_c32151 _d32151 |
||