| 000 | 00562nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2019 xx 000 0 und d | ||
| 022 | _a978-1-7281-4503-7 | ||
| 022 | _a978-1-7281-4504-4 | ||
| 041 | _aeng | ||
| 245 | _a2019 International Conference on Optical MEMS and Nanophotonics (OMN) | ||
| 260 |
_bIEEE _c2019 |
||
| 500 | _aProceeding | ||
| 650 | _aBioengineering | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEngineered Materials | ||
| 650 | _aPhotonics and Electrooptics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8918714 | ||
| 999 |
_c23019 _d23019 |
||