| 000 | 00769nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2018 xx 000 0 und d | ||
| 022 | _a978-1-5090-6374-1 | ||
| 022 | _a978-1-5090-6375-8 | ||
| 041 | _aeng | ||
| 245 | _a2018 International Conference on Optical MEMS and Nanophotonics (OMN) | ||
| 260 |
_bIEEE _c2018 |
||
| 500 | _aProceeding | ||
| 650 | _aCircuits | ||
| 650 | _aCommunication | ||
| 650 | _aComponents | ||
| 650 | _aDevices and Systems | ||
| 650 | _aDielectrics and Plasmas | ||
| 650 | _aEngineered Materials | ||
| 650 | _aFields | ||
| 650 | _aNetworking and Broadcast Technologies | ||
| 650 | _aPhotonics and Electrooptics | ||
| 650 | _aWaves and Electromagnetics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8445122 | ||
| 999 |
_c21116 _d21116 |
||