| 000 | 00642nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2017 xx 000 0 und d | ||
| 022 | _a978-1-5386-4001-2 | ||
| 022 | _a978-1-5386-4002-9 | ||
| 041 | _aeng | ||
| 245 | _a2017 XIIIth International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) | ||
| 260 |
_bIEEE _c2017 |
||
| 500 | _aProceeding | ||
| 650 | _aBioengineering | ||
| 650 | _aCircuits | ||
| 650 | _aComponents | ||
| 650 | _aComputing and Processing | ||
| 650 | _aDevices and Systems | ||
| 650 | _aEngineering Profession | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=7934839 | ||
| 999 |
_c19567 _d19567 |
||