| 000 | 00671nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 230209s2017 xx 000 0 und d | ||
| 022 | _a978-1-5386-1216-3 | ||
| 041 | _aeng | ||
| 245 | _a2017 Joint International Symposium on e-Manufacturing and Design Collaboration (eMDC) & Semiconductor Manufacturing (ISSM) | ||
| 260 |
_bIEEE _c2017 |
||
| 500 | _aProceeding | ||
| 650 | _aEngineering Profession | ||
| 650 | _aFields | ||
| 650 | _aGeneral Topics for Engineers | ||
| 650 | _aRobotics and Control Systems | ||
| 650 | _aSignal Processing and Analysis | ||
| 650 | _aWaves and Electromagnetics | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?punumber=8078142 | ||
| 999 |
_c19444 _d19444 |
||