| 000 | 00506nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230208s9999 xx 000 0 und d | ||
| 041 | _aeng | ||
| 100 | _aNadim Maluf | ||
| 245 | _aAn Introduction to Microelectromechanical Systems Engineering | ||
| 250 | _a2nd Ed. | ||
| 260 | _bArtech House Inc. | ||
| 300 | _a306 | ||
| 650 | _aMechanical | ||
| 856 | _uhttp://192.168.3.1/ebooks/link/ebook/Mechanical/An Introduction to Microelectromechanical Systems Engineering By Nadim Maluf.pdf | ||
| 999 |
_c16243 _d16243 |
||