000 00531nam a2200157Ia 4500
008 230208s2006 xx 000 0 und d
020 _a978-0-8493-9137-8
041 _aeng
100 _aGad-el-Hak, Mohamed
245 _aMEMS: introduction and fundamentals
250 _a2 Ed.
260 _aNew York
_bTaylor & Francis
_c2006
300 _a469
650 _aMechanical
856 _uhttp://192.168.3.1/ebooks/link/ebook/Mechanical/The MEMS Handbook Introduction and Fundamentals (2nd Ed) - M. Gad el Hak.pdf
999 _c15091
_d15091