TY - BOOK TI - Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) PB - IEEE KW - Dielectrics and Plasmas KW - Energy and Industry Applications KW - Engineered Materials KW - Engineering Profession KW - Power N1 - Conference UR - https://ieeexplore.ieee.org/servlet/opac?punumber=1836364 ER -