TY  - BOOK
TI  - 2021 IEEE XVIIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)
SN  - 978-1-665
PY  - 2021///
PB  - IEEE
KW  - Bioengineering
KW  - Circuits
KW  - Communication
KW  - Components
KW  - Devices and Systems
KW  - Dielectrics and Plasmas
KW  - Engineered Materials
KW  - Networking and Broadcast Technologies
KW  - Photonics and Electrooptics
KW  - Robotics and Control Systems
KW  - Signal Processing and Analysis
N1  - Proceeding
UR  - https://ieeexplore.ieee.org/servlet/opac?punumber=9467831
ER  -