2021 IEEE XVIIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) 

 -  IEEE  2021 
<br/><br/> Proceeding 
<br/><br/><label>ISSN: </label>978-1-6654-2410-3 978-1-6654-2411-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Bioengineering<br/>Circuits<br/>Communication<br/>Components<br/>Devices and Systems<br/>Dielectrics and Plasmas<br/>Engineered Materials<br/>Networking and Broadcast Technologies<br/>Photonics and Electrooptics<br/>Robotics and Control Systems<br/>Signal Processing and Analysis