TY  - BOOK
AU  - Gad-el-Hak, Mohamed
TI  - MEMS: introduction and fundamentals
SN  - 978-0-8493-9137-8
PY  - 2006///
CY  - New York
PB  - Taylor & Francis
KW  - Mechanical
UR  - http://192.168.3.1/ebooks/link/ebook/Mechanical/The MEMS Handbook Introduction and Fundamentals (2nd Ed) - M. Gad el Hak.pdf
ER  -