Gad-el-Hak, Mohamed <br/><br/>
MEMS: introduction and fundamentals 

 - 2 Ed. 
 - New York  Taylor & Francis  2006 
 - 469 
<br/><br/><label>ISBN: </label>978-0-8493-9137-8 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical