IEEE Transactions on Semiconductor Manufacturing 

 -  IEEE  2010 
<br/><br/> Journal 
<br/><br/><label>ISSN: </label>0894-6507 1558-2345 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuits<br/>Components<br/>Devices and Systems<br/>Dielectrics and Plasmas<br/>Engineered Materials