TY  - BOOK
AU  - Trimmer
TI  - Micromechanics and MEMS: Classic and Seminal Papers to 1990
SN  - 9780470545263
PY  - 1997///
PB  - Wiley-IEEE Press
KW  - Computing and Processing
UR  - https://ieeexplore.ieee.org/servlet/opac?bknumber=5273520
ER  -