Trimmer <br/><br/>
Micromechanics and MEMS: Classic and Seminal Papers to 1990 

 -  Wiley-IEEE Press  1997 
 -  fulltext 
<br/><br/><label>ISBN: </label>9780470545263 9780780310858 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Computing and Processing