TY  - BOOK
AU  - Grill
TI  - Cold Plasma Materials Fabrication: From Fundamentals to Applications
SN  - 9780470544273
PY  - 1994///
PB  - Wiley-IEEE Press
KW  - Circuits
KW  - Devices and Systems
KW  - Components
UR  - https://ieeexplore.ieee.org/servlet/opac?bknumber=5271223
ER  -