MEMS: introduction and fundamentals
Gad-el-Hak, Mohamed
MEMS: introduction and fundamentals - 2 Ed. - New York Taylor & Francis 2006 - 469
978-0-8493-9137-8
Mechanical
MEMS: introduction and fundamentals - 2 Ed. - New York Taylor & Francis 2006 - 469
978-0-8493-9137-8
Mechanical